Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleNeue Entwicklungen beim Hohlkatoden-Gasflusssputtern.AuthorsKai Ortner; Mario Birkholz; Thomas JungPublicationVakuum in Forschung und Praxis, 2003, Vol 15, Issue 5, p236ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200300196