Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleFabrication of Silicon Nanopillar Teradot Arrays by Electron-Beam Patterning for Nanoimprint Molds.AuthorsWi, Jung-Sub; Lee, Hyo-Sung; Lim, Kipil; Nam, Sung-Wook; Kim, Hyun-Mi; Park, Soo-Yeon; Lee, Jae Jong; Hong, Chris Daehoon; Jin, Sungho; Kim, Ki-BumPublicationSmall, 2008, Vol 4, Issue 12, p2118ISSN1613-6810Publication typeArticleDOI10.1002/smll.200800625