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- Title
Monte Carlo simulation of secondary electron images for real sample structures in scanning electron microscopy.
- Authors
Zhang, P.; Wang, H. Y.; Li, Y. G.; Mao, S. F.; Ding, Z. J.
- Abstract
Monte Carlo simulation methods for the study of electron beam interaction with solids have been mostly concerned with specimens of simple geometry. In this article, we propose a simulation algorithm for treating arbitrary complex structures in a real sample. The method is based on a finite element triangular mesh modeling of sample geometry and a space subdivision for accelerating simulation. Simulation of secondary electron image in scanning electron microscopy has been performed for gold particles on a carbon substrate. Comparison of the simulation result with an experiment image confirms that this method is effective to model complex morphology of a real sample. SCANNING 34: 145-150, 2012. © 2011 Wiley Periodicals, Inc.
- Publication
Scanning, 2012, Vol 34, Issue 3, p145
- ISSN
0161-0457
- Publication type
Article
- DOI
10.1002/sca.20288