Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleTEM Study of Aluminum Oxynitride Films Prepared by Reactive R.F.-Sputtering.AuthorsLai, L-C; Nose, M; Chiou, W-A; Saiki, AAbstractExtended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.SubjectsTRANSMISSION electron microscopy; ALUMINUM oxynitride spinelPublicationMicroscopy & Microanalysis, 2011, Vol 17, Issue S2, p1920ISSN1431-9276Publication typeAbstractDOI10.1017/S1431927611010476