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- Title
Semiconductor nanomembranes for integrated silicon photonics and flexible Photonics.
- Authors
Zhou, Weidong; Ma, Zhenqiang; Chuwongin, Santhad; Shuai, Yi-Chen; Seo, Jung-Hun; Zhao, Deyin; Yang, Hongjun; Yang, Weiquan
- Abstract
Crystalline semiconductor nanomembranes (NMs), which are transferable, stackable, bondable and manufacturable, offer unprecedented opportunities for unique and novel device applications. We review here nanophotonic devices based on stacked semiconductor NMs on Si, glass and flexible PET substrates. Photonic crystal Fano resonance-based surface-normal optical filters and broadband reflectors have been demonstrated with unique angle and polarization properties. Flexible photodetectors and solar cells have also been developed based on the NM stacking processes. Such NM stacking process can lead to a paradigm shift on silicon photonic integration and hybrid organic/inorganic flexible photonics.
- Subjects
SEMICONDUCTORS; NANOSTRUCTURED materials; ARTIFICIAL membranes; INTEGRATED circuits; SILICON; PHOTONICS; LIGHT filters
- Publication
Optical & Quantum Electronics, 2012, Vol 44, Issue 12/13, p605
- ISSN
0306-8919
- Publication type
Article
- DOI
10.1007/s11082-012-9586-8