Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleVPD/TXRF analysis of trace elements on a silicon wafer.AuthorsYamagami, Motoyuki; Nonoguchi, Masahiro; Yamada, Takashi; Shoji, Takashi; Utaka, Tadashi; Nomura, Shigeaki; Taniguchi, Kazuo; Wakita, Hisanobu; Ikeda, ShigerouPublicationXRS: X-ray Spectrometry, 1999, Vol 28, Issue 6, p451ISSN0049-8246Publication typeArticleDOI10.1002/(SICI)1097-4539(199911/12)28:6<451::AID-XRS381>3.0.CO;2-V