Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitlePoly(silamine)s as new electron-beam resist materials.AuthorsNagasaki, Yukio; Yamazaki, Noriyuki; Deguchi, Ken-Ichiro; Kato, MasaoPublicationMacromolecular Rapid Communications, 1996, Vol 17, Issue 1, p51ISSN1022-1336Publication typeArticleDOI10.1002/marc.1996.030170108