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- Title
Design and fabrication of cost‐effective side‐stem micromechanical disk resonator with large capacitive gap.
- Authors
Phamvan, Huan; Seok, Jongwon; Choi, Hae‐Jin
- Abstract
A high‐performance micromechanical disk resonator is developed for use in mass detection biosensors. The resonator is designed to facilitate easy and cost‐effective fabrication by anchoring the disk on the side stems and increasing the capacitive gap size up to 4.75 µm. The designed disk resonator operates in an elliptic contour‐mode at a resonance frequency of 5.971 MHz with a quality factor of 4272 in ambient air condition and 17 221 in a 600 Torr vacuum environment.
- Publication
Electronics Letters (Wiley-Blackwell), 2014, Vol 50, Issue 11, p764
- ISSN
0013-5194
- Publication type
Article
- DOI
10.1049/el.2014.0665