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- Title
Design and Fabrication of Highly Selective Polarizers Using Metallic–Dielectric Gratings.
- Authors
Zhu, Jingyuan; Ning, Yi; Liu, Liang; Dong, Siyu; Chen, Yifang; Wang, Zhanshan; Cheng, Xinbin
- Abstract
Polarization imaging has been proven as an important technique for obtaining multi-dimensional information in complex environments. As the prevalent polarizers, metal gratings are widely used especially for focal-plane detection due to their flexibility and easy integration. However, high-performance polarization gratings with high transmittance and large extinction ratios typically need a large aspect ratio in design, resulting in more difficulties in fabrication with limited practical performances. In this study, we designed and fabricated a high-performance polarizer using metallic–dielectric gratings (MDGs). Through a single CMOS-compatible procedure that included electron-beam lithography (EBL) and a collimated thermal evaporation deposition process, we achieved a high TM transmittance (~90%) and a high extinction ratio (~100:1) in the experiment. We believe that our work provides an effective approach to high-performance polarization gratings, which could contribute to the development of on-chip integrated polarization imaging.
- Subjects
LITHOGRAPHY; DESIGN; METALS
- Publication
Photonics, 2023, Vol 10, Issue 1, p52
- ISSN
2304-6732
- Publication type
Article
- DOI
10.3390/photonics10010052