We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Changes in the elemental composition and microstructure of an YBaCuO target during magnetron sputtering.
- Authors
Masterov, D.; Drozdov, M.; Drozdov, Yu.; Pavlov, S.; Parafin, A.; Yunin, P.
- Abstract
YBaCuO high-temperature superconductor targets subjected to ion-plasma sputtering in a magnetron-sputtering system are studied by X-ray diffraction analysis and secondary ion-mass spectrometry. It is found that dc magnetron sputtering is accompanied by diffusive oxygen depletion and restructuring of the target surface caused by radiation and heat effects of bombarding ions. It is assumed that these changes in the target are responsible for a decrease in the growth rate of YBaCuO films.
- Subjects
YTTRIUM barium copper oxide; METAL microstructure; MAGNETRON sputtering; HIGH temperature superconductors; ION acoustic waves; X-ray diffraction; SECONDARY ion mass spectrometry
- Publication
Technical Physics Letters, 2013, Vol 39, Issue 10, p862
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785013100076