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- Title
Machinability improvement of silicon carbide via femtosecond laser surface modification method.
- Authors
Meng, Binbin; Zheng, Jian; Yuan, Dandan; Xu, Shaolin
- Abstract
In this paper, the laser-induced periodic surface structures (LIPSS) of single-crystal SiC and the machining properties of the modified layer are studied. The distribution of surface features as a function of laser repetition frequency and the phase of micro/nanostructures of the surface modification layer are investigated. Furthermore, wear and machinability of the modified SiC layer are analyzed using nano-scratching. The results indicate that surface modification with the femtosecond laser can effectively reduce the pushing and extrusion of material as well as facilitate removal of materials. The hybrid-grinding method can also reduce the influence of the size effect during processing, which effectively improves machinability of SiC during ultra-precision grinding process.
- Subjects
CRYSTALLOGRAPHY; SILICON carbide; OPTICAL properties of silicon carbide; MACHINABILITY of metals; FEMTOSECOND lasers; NANOSTRUCTURES; GRINDING &; polishing
- Publication
Applied Physics A: Materials Science & Processing, 2019, Vol 125, Issue 1, p1
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-018-2377-8