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- Title
High-Efficiency Electron Source with a Hollow Cathode in Technologies of Thin Film Deposition and Surface Treatment under Forevacuum Pressures.
- Authors
Shchukin, V. G.; Konstantinov, V. O.; Morozov, V. S.
- Abstract
It is shown that low-energy beams with a high efficiency in a wide range of beam currents can be obtained in electron sources with a hollow cathode in the forevacuum pressure range. By varying the geometrical parameters of the electrode system and electromagnetic optics of the electron source, we succeeded in reaching the efficiency at a level of 0.9 for an accelerating potential of 1 kV and beam currents from 100 to 300 mA. The parameters affecting most strongly the efficiency and stability of operation of the electron source with a hollow cathode have been determined.
- Subjects
ELECTRON sources; CATHODE efficiency; THIN film deposition; VACUUM technology; SURFACE preparation; ELECTRON emission research; ELECTROMAGNETIC fields; PLASMA flow; EQUIPMENT &; supplies
- Publication
Technical Physics, 2018, Vol 63, Issue 6, p888
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784218060191