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- Title
Static and Dynamic Behaviors of an Electrostatically Actuated Micro Beam.
- Authors
Fakhrabadi, M. M. S.; Dadashzadeh, B.; Norouzifard, V.; Dadashzadeh, M.
- Abstract
This paper presents the static and dynamic behaviors of a doubly clamped micro beam under electrostatic actuation. Responses to direct and alternating currents and the pull-in phenomena of the mentioned micro beam are presented in detail. The effects of dimensional variations on pull-in phenomena are investigated and also the effects of applied voltages on the fundamental natural frequency of the micro beam are presented.
- Subjects
ELECTROSTATICS; DIRECT currents; ALTERNATING currents; ELECTRIC potential; HOT potato routing; INERTIA (Mechanics)
- Publication
International Review on Modelling & Simulations, 2011, Vol 4, Issue 2, p710
- ISSN
1974-9821
- Publication type
Article