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- Title
MIS Structure with Polyamide Insulator under the Conditions of Water Vapor Sorption.
- Authors
Tutov, E. A.; Bormontov, E. N.; Pavlenko, M. N.; Netesova, G. A.; Tutov, E. E.
- Abstract
A silicon MIS structure with sulfonate-containing aromatic polyamide as a gate insulator is prepared with the aim of using it as a capacitive-type humidity detector. A detector made of this material offers a high sensitivity at an elevated relative humidity and a high speed of response. Measurements of the capacitance of the structure at different frequencies basically make it possible to determine the water distribution in the polymer matrix. The high-frequency (1 MHz) capacitance versus relative humidity dependence (i.e., the calibration curve of the detector) is typical of the isotherms of water vapor sorption by similar polymers. © 2005 Pleiades Publishing, Inc.
- Subjects
SULFONATES; POLYAMIDES; ABSORPTION; HUMIDITY; ATMOSPHERIC temperature; PHYSICS
- Publication
Technical Physics, 2005, Vol 50, Issue 8, p1048
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/1.2014537