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- Title
The Diffusion-reaction Model on the Wettability Gradient Created by SF<sub>6</sub> Plasma.
- Authors
Mangindaan, Dave; Kuo, Chang-Cheng; Lin, Shi-Yow; Wang, Meng-Jiy
- Abstract
Previously a model was reported on the simulation of a SF6 plasma generated wettability gradient by considering only the diffusion of the reactive species in plasma. This study proposed a modified model to describe the wettability gradient created by SF6 plasma by further considering the chemical reactions between the plasma species and the substrate. The wettability gradient was prepared by applying SF6 plasma on the O2 plasma pretreated polypropylene film that was covered with a mask. Experimentally, the chemical composition and surface wettability along the gradient was characterized by electron spectroscopy for chemical analysis, contact angle measurements and atomic force microscopy. For the mathematical model, two main assumptions were made for the formation of gradient on the surface of substrate: (i) the dissociation and ionization of SF6 plasma in the vacuum chamber followed the diffusion-adsorption-reaction processes and (ii) the fluorine radicals were the principle reactive species. The computation of the numerical solutions was facilitated by the finite element method. The simulated surface fluorine content and surface wettability matched exceptionally (≈95%) with the experimental results. The numerical evaluation of the spatial distribution of plasma reactive species in the mask in y- and z-directions and t-domain also assisted the understanding of the surface interactions on the gradients.
- Publication
Plasma Processes & Polymers, 2012, Vol 9, Issue 8, p808
- ISSN
1612-8850
- Publication type
Article
- DOI
10.1002/ppap.201100186