Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleGeneration of Positive and Negative Oxygen Ions in Magnetron Discharge During Reactive Sputtering of Alumina.AuthorsPokorný, Petr; Bulíř, Jiří; Lančok, Ján; Musil, Jindřich; Novotný, MichalPublicationPlasma Processes & Polymers, 2010, Vol 7, Issue 11, p910ISSN1612-8850Publication typeArticleDOI10.1002/ppap.201000064