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- Title
Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining.
- Authors
Lin, Jintian; Xu, Yingxin; Fang, Zhiwei; Wang, Min; Song, Jiangxin; Wang, Nengwen; Qiao, Lingling; Fang, Wei; Cheng, Ya
- Abstract
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 105 around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.
- Subjects
MICROMACHINING; LITHIUM niobate; SPECTRUM analysis; MICRORESONATORS (Optoelectronics); FEMTOSECOND lasers; NONLINEAR optical materials; OPTICAL materials
- Publication
Scientific Reports, 2015, p8072
- ISSN
2045-2322
- Publication type
Article
- DOI
10.1038/srep08072