Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleMethod of Shortening Settling Time Using Final State Control for High-Precision Stage with Decouplable Structure of Fine and Coarse Parts.AuthorsYAZAKI, YUMA; FUJIMOTO, HIROSHI; HORI, YOICHI; SAKATA, KOICHI; HARA, ATSUSHI; SAIKI, KAZUAKIPublicationElectrical Engineering in Japan, 2016, Vol 195, Issue 4, p39ISSN0424-7760Publication typeArticleDOI10.1002/eej.22829