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- Title
Atomic Layer Deposition of Tunnel Barriers for Superconducting Tunnel Junctions.
- Authors
Moyerman, Stephanie; Feng, Guangyuan; Krayer, Lisa; Stebor, Nathan; Keating, Brian
- Abstract
We demonstrate a technique for creating high quality, large area tunnel junction barriers for normal-insulating-superconducting or superconducting-insulating-superconducting tunnel junctions. We use atomic layer deposition and an aluminum wetting layer to form a nanometer scale insulating barrier on gold films. Electronic transport measurements confirm that single-particle electron tunneling is the dominant transport mechanism, and the measured current-voltage curves demonstrate the viability of using these devices as self-calibrated, low temperature thermometers with a wide range of tunable parameters. This work represents a promising first step for superconducting technologies with deposited tunnel junction barriers. The potential for fabricating high performance junction refrigerators is also highlighted.
- Subjects
SUPERCONDUCTING junction devices; ATOMIC layer deposition; GOLD films; PARTICLE detectors; NANOELECTROMECHANICAL systems; THERMOMETERS
- Publication
Journal of Low Temperature Physics, 2014, Vol 176, Issue 3/4, p237
- ISSN
0022-2291
- Publication type
Article
- DOI
10.1007/s10909-014-1114-8