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- Title
Creating Lithographic Pictures Using Faceted Zinc Oxide Microparticles on a Silicon Substrate.
- Authors
Bobkov, A. A.; Pronin, I. A.; Moshnikov, V. A.; Yakushova, N. D.; Karmanov, A. A.; Averin, I. A.; Somov, P. A.; Terukov, E. I.
- Abstract
Lithography techniques compatible with silicon technology have been developed within the hydrothermal method. Topological layouts were formed by faceted microcrystals with the developed surface. The prospects for implementing new hierarchical structures are of special interest.
- Subjects
LITHOGRAPHIC workshops; FACETED classification; ZINC oxide; SILICON compounds; SURFACES (Physics)
- Publication
Technical Physics Letters, 2018, Vol 44, Issue 8, p694
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785018080047