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- Title
Design and Evaluation of a Spider Web-Like Single-Axis Micro-Electro-Mechanical Systems Accelerometer with High Sensitivity and Fast Response.
- Authors
Al-Mumen, Haider
- Abstract
This research delves into the design, simulation, and evaluation of a high-sensitivity, swiftresponse single-axis Micro-Electro-Mechanical Systems (MEMS) accelerometer, inspired by the intricate design of a spider web. The accelerometer, characterized by a circular silicon structure of 1 mm radius, embraces a proof mass with a radius and thickness of 60 µm and 2 µm, respectively. A comprehensive study was undertaken to scrutinize the electrical properties, notably the time response, and mechanical properties, specifically the stress effects on the device. An outstanding sensitivity of 0.047 µm/g and a brisk rise time of 0.1 ms within the acceleration range of -50 to 50 g were observed. A signal conditioning and processing circuit, composed of a bridge circuit, two operational amplifiers functioning as a difference amplifier, and a filter, was meticulously designed using MATLAB and integrated with the accelerometer sensor, facilitating the derivation of a DC output voltage representative of the sensed acceleration. The simplicity, ease of modification, swift response, and high sensitivity of the proposed MEMS accelerometer underscore its promising application potential.
- Subjects
MICROELECTROMECHANICAL systems; DIFFERENTIAL amplifiers; BRIDGE circuits; SIGNAL processing
- Publication
Instrumentation, Mesures, Métrologies, 2023, Vol 22, Issue 5, p209
- ISSN
1631-4670
- Publication type
Article
- DOI
10.18280/i2m.220504