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- Title
Properties of Barium Cerate-Zirconate Thin Films.
- Authors
Winiarz, Piotr; Covarrubias, Monica Susana Campos; Sriubas, Mantas; Bockute, Kristina; Miruszewski, Tadeusz; Skubida, Wojciech; Jaworski, Daniel; Laukaitis, Giedrius; Gazda, Maria
- Abstract
In this work, we review several experimental results showing the electrical properties of barium cerate-zirconate thin films and discuss them in view of the possible influence of various factors on their properties. Most of the presented Ba(Ce, Zr, Y)O3 thin films were formed by the pulsed laser deposition (PLD) technique, however thin films prepared using other methods, like RF magnetron sputtering, electron-beam deposition, powder aerosol deposition (PAD), atomic layer deposition (ALD) and spray deposition are also reported. The electrical properties of the thin films strongly depend on the film microstructure. The influence of the interface layers, space-charge layers, and strain-modified layers on the total conductivity is also essential but in many cases is weaker.
- Subjects
MAGNETRON sputtering; THIN films; ATOMIC layer deposition; BARIUM; PULSED laser deposition; RADIOFREQUENCY sputtering
- Publication
Crystals (2073-4352), 2021, Vol 11, Issue 8, p1005
- ISSN
2073-4352
- Publication type
Article
- DOI
10.3390/cryst11081005