Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleAnalytical modeling of the harmonic distortion caused by squeeze film damping in MEMS-based acoustic transducers.AuthorsMELNIKOV, Anton; SCHENK, Hermann A. G.; WALL, FranziskaPublicationVibrations in Physical Systems, 2024, Vol 35, Issue 1, p1ISSN0860-6897Publication typeArticleDOI10.21008/j.0860-6897.2024.1.06