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- Title
Aberration properties of odd-order surfaces in optical design.
- Authors
Takao Tanabe; Masato Shibuyaa
- Abstract
We theoretically represent the effectiveness of the odd-order surface for optical designs via an aberration theory. The theory employs an expression of the odd-order surface with aberration coefficients, which are derived by power-series expansion of wavefront aberration with respect to the coordinates of optical surfaces. This expression allows us to understand the aberration characteristics of odd-order surfaces. By applying this aberration theory to the design of extreme ultraviolet lithography optics, we show that odd-order surfaces are effective in reducing higher-order aberrations with fewer coefficients than even-order surfaces do.
- Subjects
OPTICAL aberrations; WAVEFRONTS (Optics); ULTRAVIOLET lithography
- Publication
Optical Engineering, 2016, Vol 55, Issue 12, p1
- ISSN
0091-3286
- Publication type
Article
- DOI
10.1117/1.OE.55.12.125107