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- Title
Wafer-scale silicon optically controlled absorber/reflector surface.
- Authors
Fusco, V.; Nair, B.
- Abstract
A wafer-scale silicon optically controlled wafer antenna array, which can be used to reflect or absorb incident microwave energy at 10 GHz, is presented. A 2-μm-thick copper printed dipole array, loaded with matched polysilicon resistive terminations, is fabricated on a 4-inch-high resistivity, 6kΩ-cm, 525-μm-thick silicon wafer. A second unprocessed wafer, optically controlled by an optical source, provides a shutter mechanism so that the assembly acts as a reflector/absorber surface or spatial switch. The arrangement is shown to provide 25-dB isolation between reflecting and absorbing states at 10.1 GHz. © 2005 Wiley Periodicals, Inc. Microwave Opt Technol Lett 44: 318–320, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.20622
- Subjects
SILICON; NONMETALS; ANTENNA arrays; ANTENNAS (Electronics); ELECTRONIC equipment
- Publication
Microwave & Optical Technology Letters, 2005, Vol 44, Issue 4, p318
- ISSN
0895-2477
- Publication type
Article
- DOI
10.1002/mop.20622