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- Title
Structure of the direct-current magnetron discharge in neon at different polarities of the electrode system.
- Authors
Sasin, A.; Wagner, S.; Platonov, A.
- Abstract
dc magnetron discharge in neon is studied at different polarities of the electrode system. It is found that the electron energy distribution function is composed of three groups of electrons: fast electrons accelerated by the strong field of a cathode sheath, slow electrons confined in a potential well due to the space-charge field, and intermediate-energy electrons. It is shown that the energy distribution of the confined electrons is a Maxwell-Boltzmann distribution function, whereas the energy distribution of the intermediate electrons is typical of electron diffusion at a constant total energy. The measured values of the cathode sheath thickness depend on the source polarity.
- Subjects
MAGNETRONS; ELECTRIC discharges; NEON; ELECTRODES; CATHODE rays
- Publication
Technical Physics, 2010, Vol 55, Issue 9, p1283
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784210090082