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- Title
P-16: The Research of Dual-Layer Channel ITO/MZO Thin Film Transistors Fabricated on Glass at Low Temperature.
- Authors
Shi, Pan; Han, Dedong; Yu, Wen; Chen, Zhuofa; Zhao, Nannan; Zhao, Feilong; Wu, Jing; Dong, Junchen; Cong, Yingying; Huang, Lingling; Zhang, Yi; Zhang, Shengdong; Zhang, Xing; Wang, Yi
- Abstract
High-performance dual-layer channel ITO/MZO thin film transistors have been successfully fabricated on glass substrate at low temperature. The dual-layer channel is composed of ITO and MZO layers. The use of the a-ITO layer brought about enhanced subthreshold swing, enhanced saturation mobility and decreased threshold voltage compared to the MZO TFTs.
- Subjects
THIN film transistors; SUBSTRATES (Materials science); SEMICONDUCTORS; AMORPHOUS substances; OPTICAL instruments
- Publication
SID Symposium Digest of Technical Papers, 2015, Vol 46, Issue 1, p1176
- ISSN
0097-966X
- Publication type
Article
- DOI
10.1002/sdtp.10046