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- Title
Modification of the Ferromagnetic Properties of Si<sub>1 -</sub><sub>x</sub>Mn<sub>x</sub> Thin Films Synthesized by Pulsed Laser Deposition with a Variation in the Buffer-Gas Pressure.
- Authors
Novodvorsky, O. A.; Mikhalevsky, V. A.; Gusev, D. S.; Lotin, A. A.; Parshina, L. S.; Khramova, O. D.; Cherebylo, E. A.; Drovosekov, A. B.; Rylkov, V. V.; Nikolaev, S. N.; Chernoglazov, K. Yu.; Maslakov, K. I.
- Abstract
Abstract: A series of thin films of Si1 -xMnx alloys with a thickness from 50 to 100 nm grown by pulsed laser deposition on an Al2O3 substrate in vacuum and in an argon atmosphere is investigated. The significant effect of the buffer-gas pressure in the sputtering chamber on the structural and magnetic homogeneity of the obtained films is shown. The conditions for the formation of a ferromagnetic phase with a high Curie temperature (>300 K) in the samples are studied. With the use of the Langmuir probe method, the threshold of ablation of a MnSi target by second harmonic radiation (λ = 532 nm) of a Nd:YAG Q-switch laser is determined. The time-of-flight curves for the plume ions are obtained with a change in the energy density at the target and argon pressure in the sputtering chamber. A nonmonotonic dependence of the probe time-of-flight signal amplitude on the argon pressure is established for high-energy particles of the plume.
- Subjects
FERROMAGNETIC materials; THIN films; PULSED laser deposition; ALLOYS; SUBSTRATES (Materials science)
- Publication
Semiconductors, 2018, Vol 52, Issue 11, p1424
- ISSN
1063-7826
- Publication type
Article
- DOI
10.1134/S1063782618110179