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- Title
Influence of argon fraction on plasma parameters in H<sub>2</sub>-N<sub>2</sub> mixture discharge with cathodic cage.
- Authors
Naeem, Muhammad; Zaka-ul-Islam, Mujahid; Khattak, Zahid Iqbal; Shafiq, Muhammad; Zakaullah, Muhammad
- Abstract
Low-pressure H2-N2 mixture pulsed DC plasmas with a cathodic cage (active screen) are widely used for plasma nitriding applications. In this study, the low-pressure H2-N2 mixture plasma with a cathodic cage generated by 50 Hz pulsed DC source is investigated with triple Langmuir probe and optical emission spectroscopy. The electron temperature (TLPe ) and electron number density (ne) are measured using a triple Langmuir probe (TLP). The excitation temperature (TOESexc) is calculated spectroscopically using Boltzmann plot method whereas nitrogen dissociation fraction is estimated using actinometry as well as the intensity ratio method (IN(746.83 nm)/IN2(337.1 nm)). The results show that the electron and excitation temperatures, electron density and nitrogen atomic species density [N] all increase with the argon admixture, however, the important molecular ionized species density [N+2] significantly decreases beyond 30% addition. This study provides useful information about the influence of the argon addition on plasma parameters and active species generation. As a result it helps to optimize the plasma nitriding system as a function of argon admixture to avoid random trials in the processing.
- Subjects
ARGON; LANGMUIR probes; ELECTRON density; ZIRCONIUM compounds synthesis; MASS spectrometry
- Publication
European Physical Journal - Applied Physics, 2017, Vol 77, Issue 1, pp1
- ISSN
1286-0042
- Publication type
Article
- DOI
10.1051/epjap/2016160280