Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleDeutsche Vakuum-Gesellschaft - DVG -.PublicationVakuum in Forschung und Praxis, 1992, Vol 4, Issue 1, p65ISSN0947-076XPublication typeArticleDOI10.1002/vipr.2230040115