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- Title
Optical Property Characterization of Different Sized Pinholes for Precision Thin-film Optical Inspection.
- Authors
C-C. KUO; Y-R. CHEN
- Abstract
Peak power density stability and beam-wander precision of probe laser are important factors affecting the inspection results in the precision thingilm optical measurements. Pinholes are frequently used as a spatial filter in the optical inspection system. In this work, five different diameters of pinhole are investigated experimentally. It is found that pinhole diameter of 0.3 mm is considered to be a promising candidate for mounting in front of probe laser for silicon thin-film optical inspection due to better peak power density stability and better beam-wander precision.
- Subjects
THIN films; OPTICAL properties; OPTICAL quality control; PRECISION (Information retrieval); PINHOLE photography; POWER density; STABILITY (Mechanics); SPATIAL filters
- Publication
Lasers in Engineering (Old City Publishing), 2012, Vol 23, Issue 1/2, p85
- ISSN
0898-1507
- Publication type
Article