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- Title
Optimization in fabricating skutterudite CoSb thermoelectric thin films.
- Authors
Zheng, Zhuang-hao; Wei, Meng; Li, Fu; Luo, Jing-ting; Ma, Hong-li; Liang, Guang-xing; Zhang, Xiang-hua; Fan, Ping
- Abstract
CoSb based thin films were prepared at room temperature by radio-frequency sputtering and the CoSb alloy targets were used with the Co:Sb atomic ratio of 1:3, 1:3.5 and 1:4, respectively. Then the as-deposited thin films were annealed at 300 and 325 °C under argon atmosphere for 1 h. It can be found that the thin films have single skutterudite phase structure when used the Co:Sb (1:3.5) alloy target. Though other films show the primary CoSb phase structure, there are some impurity phases can be observed from the X-ray diffraction patterns. For contrast, the thin films prepared by the Co:Sb (1:3.5) alloy target were annealed from 250 to 350 °C with the temperature interval of 25 °C. The results show that the thin film annealed at 325 °C has the best thermoelectric performance.
- Subjects
THERMOELECTRIC materials; X-ray diffraction; THERMAL conductivity; CONDENSED matter physics; CRYSTAL structure
- Publication
Journal of Materials Science: Materials in Electronics, 2017, Vol 28, Issue 22, p17221
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-017-7652-5