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- Title
Light-Sheet Microscopy for Surface Topography Measurements and Quantitative Analysis.
- Authors
Xu, Zhanpeng; Forsberg, Erik; Guo, Yang; Cai, Fuhong; He, Sailing
- Abstract
A novel light-sheet microscopy (LSM) system that uses the laser triangulation method to quantitatively calculate and analyze the surface topography of opaque samples is discussed. A spatial resolution of at least 10 μm in z-direction, 10 μm in x-direction and 25 μm in y-direction with a large field-of-view (FOV) is achieved. A set of sample measurements that verify the system′s functionality in various applications are presented. The system has a simple mechanical structure, such that the spatial resolution is easily improved by replacement of the objective, and a linear calibration formula, which enables convenient system calibration. As implemented, the system has strong potential for, e.g., industrial sample line inspections, however, since the method utilizes reflected/scattered light, it also has the potential for three-dimensional analysis of translucent and layered structures.
- Subjects
SURFACE topography measurement; MICROSCOPY; QUANTITATIVE research; TRANSLUCENCY (Optics); SURFACE topography; LIGHT scattering
- Publication
Sensors (14248220), 2020, Vol 20, Issue 10, p2842
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s20102842