Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleA Robust Focusing and Astigmatism Corrections for the Scanning Electron Microscope-Part II: Autocorrelation-Based Coarse Focusing MethodAuthorsOng, K. H.; Phang, J. C. H.; Thong, J. T. L.PublicationScanning, 1998, Vol 20, Issue 4, p324ISSN0161-0457Publication typeArticleDOI10.1002/sca.1998.4950200406