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- Title
An electrostatic deflection system.
- Authors
Cherepin, V.; Vasilenko, V.; Krasovskii, T.; Polubot’ko, E.
- Abstract
The system for electrostatic deflection of high-energy (up to 10 keV) ion beams at large (up to 7°) angles contains a dodecapole assembly consisting of 12 electrodes and a two-channel deflection voltage source. Each channel generates two voltages symmetrically changing from −600 to +600 V with respect to the ground, and, in this case, the absolute values of the both voltages differ by ≤1 V. The temperature voltage drift is ≤50 ppm/°C. Output voltage levels are set by a 16-bit digital-to-analog converter. The deflection-voltage source is a 95 × 65 × 40-mm module.
- Subjects
ELECTRIC resistors; ELECTROSTATIC adhesion; ION bombardment; DIGITAL electronics; DIGITAL-to-analog converters
- Publication
Instruments & Experimental Techniques, 2007, Vol 50, Issue 5, p708
- ISSN
0020-4412
- Publication type
Article
- DOI
10.1134/S0020441207050119