Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleEdward improves performance and longevity of integrated etch tool pumps.AbstractThe article evaluates the iXA line of magnetically-levitated turbomolecular pumps, STP-iXA2206 and STP-iXA3306, from Edwards Ltd.SubjectsPUMPING machinery; VACUUM pumps; EDWARDS Ltd.; SOLAR energy industries; COMMERCIAL product evaluation; EQUIPMENT &; suppliesPublicationPhotovoltaics International, 2011, Issue 11, p18ISSN1757-1197Publication typeProduct Review