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- Title
Properties of In-N doped ZnO films synthesized by ion beam assisted deposition.
- Authors
Zhi Yan; Xia Zhang; Yanhui Liu; Xiying Zhou; Jun Liang
- Abstract
The article discusses the study which describes the properties of zinc oxide films synthesized by ion beam deposition and post-annealing mechanism. It indicates that post-annealing has played an important role on the film electrical and optical properties. It notes that the optical properties showing the blue shift along with annealing time has stable qualities with no obvious morphological changes.
- Subjects
ZINC oxide; ION bombardment; ANNEALING of metals; PULSED laser deposition; OPTICAL properties
- Publication
Journal of Materials Science, 2011, Vol 46, Issue 7, p2392
- ISSN
0022-2461
- Publication type
Article
- DOI
10.1007/s10853-011-5258-5