Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.Title特集「彳真空心九最新動向」企画趣旨.Authors関 口 信 一AbstractThis special feature focuses on the latest trends in the dry vacuum pump industry. One comprehensive report along with 5 technical introductions will enhance the knowledge of users and manufactures of the dry vacuum pumps.PublicationVacuum & Surface Science, 2024, Vol 67, Issue 4, p154ISSN2433-5835Publication typeArticleDOI10.1380/vss.67.154