Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.Title国際会議 IVC-22(札幌)開催報.Authors福 井 賢PublicationVacuum & Surface Science, 2023, Vol 66, Issue 6, p360ISSN2433-5835Publication typeArticleDOI10.1380/vss.66.360