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- Title
Thermal Effects During Low-Voltage Electron-Probe X-Ray Spectral Microanalysis with Nanometer Localization.
- Authors
Kuzin, A.; Stepovich, M.; Mityukhlyaev, V.; Todua, P.; Filippov, M.
- Abstract
The thermal effect of the electron probe during low-voltage x-ray spectral microanalysis with nanometer localization is estimated. It is shown that, for most inorganic materials, thermal effects are unimportant, despite a substantial increase in the volume power density owing to electron bombardment. For organic materials, these effects can have a significant influence on the results and can also damage the sample.
- Subjects
ELECTRON probe microanalysis; ELECTRIC properties of nanostructured materials; POWER density; ORGANIC electronics; INORGANIC chemistry
- Publication
Measurement Techniques, 2017, Vol 59, Issue 10, p1061
- ISSN
0543-1972
- Publication type
Article
- DOI
10.1007/s11018-017-1092-8