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- Title
Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions.
- Authors
Korobeishchikov, N. G.; Nikolaev, I. V.; Roenko, M. A.
- Abstract
It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm–1).
- Subjects
SURFACE preparation; SURFACE finishing; POTASSIUM phosphates; SINGLE crystals; SURFACE roughness; POTASSIUM ions; COMPLEX ions
- Publication
Technical Physics Letters, 2019, Vol 45, Issue 3, p274
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785019030295