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- Title
Changes in the Structure and Properties of Quartz Successively Implanted by Zn and F Ions during Thermal Annealing.
- Authors
Privezentsev, V. V.; Steinman, E. A.; Tereshchenko, A. N.; Kolesnikov, N. N.; Makunin, A. V.
- Abstract
The temperature dependences of structural and phase transformations in quartz successively implanted by zinc and fluorine during annealing in nitrogen have been studied. Plates were doped with 64Zn+ ions to a dose of 5 × 1016 cm–2 with an energy of 50 keV and then with 19F+ ions to the same dose but with an energy of 17 keV. After the implantation, individual Zn-containing particles about 100 nm in size were found on the sample surface. These particles decrease in size during annealing (by an order of magnitude after annealing at 800°C). The implantation leads to the formation of radiation-induced point defects and their clusters in the quartz bulk. Radiation-induced defects are gradually annealed during the heat treatment, and the phase of metallic zinc is transformed first to its zinc oxide (ZnO) at 600°C and then to willemite (Zn2SiO4) at 800°C.
- Publication
Crystallography Reports, 2019, Vol 64, Issue 3, p451
- ISSN
1063-7745
- Publication type
Article
- DOI
10.1134/S1063774519030210